http://dspace.bsu.edu.ru/handle/123456789/46975| Title: | Model for ion-assisted film growth |
| Authors: | Bakai, A. S. Sleptsov, S. N. Zhukov, A. I |
| Keywords: | science physics film ion-assisted ion energy temperature |
| Issue Date: | 1997 |
| Citation: | Bakai, A.S. Model for ion-assisted film growth / A.S. Bakai, S.N. Sleptsov, A.I. Zhukov ; NSC "KhFTI" // Научные ведомости Белгородского государственного университета. - 1997. - № 2 (5). - С. 75-77. |
| Abstract: | A new model of growing film densification is proposed. The film densiti as a function of ion energy and substrate temperature is investigated |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/46975 |
| Appears in Collections: | № 2 (5) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Bakai_Model_for.pdf | 192.47 kB | Adobe PDF | View/Open |
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