| DC Field | Value | Language |
|---|
| dc.contributor.author | Bakai, A. S. | - |
| dc.contributor.author | Sleptsov, S. N. | - |
| dc.contributor.author | Zhukov, A. I | - |
| dc.date.accessioned | 2022-05-24T14:15:39Z | - |
| dc.date.available | 2022-05-24T14:15:39Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.citation | Bakai, A.S. Model for ion-assisted film growth / A.S. Bakai, S.N. Sleptsov, A.I. Zhukov ; NSC "KhFTI" // Научные ведомости Белгородского государственного университета. - 1997. - № 2 (5). - С. 75-77. | ru |
| dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/46975 | - |
| dc.description.abstract | A new model of growing film densification is proposed. The film densiti as a function of ion energy and substrate temperature is investigated | ru |
| dc.language.iso | en | ru |
| dc.subject | science | ru |
| dc.subject | physics | ru |
| dc.subject | film | ru |
| dc.subject | ion-assisted | ru |
| dc.subject | ion energy | ru |
| dc.subject | temperature | ru |
| dc.title | Model for ion-assisted film growth | ru |
| dc.type | Article | ru |
| Appears in Collections: | № 2 (5)
|
