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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon 136

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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon 6 1 2 0 9 22 4

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Kolpakov_The Effect that Nitrogen.pdf 46

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