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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon 84

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The effect that nitrogen ion irradiation and the deposition of a nanosize-thick carbon coating have on microhardness and crack-growth resistance in silicon 0 7 2 5 2 3 2

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Kolpakov_The Effect that Nitrogen.pdf 37

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