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Structure and physicomechanical properties of superhard multicomponent multilayer (TiAlСrY/Zr)/(TiAlСrYN/ZrN) coatings with double modulation period of the structure 99

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Structure and physicomechanical properties of superhard multicomponent multilayer (TiAlСrY/Zr)/(TiAlСrYN/ZrN) coatings with double modulation period of the structure 1 9 5 6 10 12 1

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