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| Обеднение кремния, индуцированное пленками нитрида кремния в структуре Si/Si₃N₄/Нематик/ITO | 1 | 6 | 0 | 0 | 8 | 16 | 5 |
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| Kucheev_Obednenie_17.pdf | 24 |
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