Influence of the magnitude of the bias potential and thickness of the layers on the structure, substructure, stress-deformed state and mechanical characteristics of vacuum-arc multi-layered (TiMo)N/(TiSi)N coatings

Abstract

Layers based on titanium nitride doped with molybdenum and silicon were used to create a multilayer composite. In this case, the mismatch between the lattice periods of (TiMo)N and (TiSi)N layers was about 1%. It was found that in the (TiMo)N/(TiSi)N multilayer composite, such a mismatch of the periods in the constituent layers does not change the single-phase state of the composite even at relatively large layer thicknesses (about 350 nm). The creation of a (TiMo)N/(TiSi)N composite with a nanometer layer thickness allows one to reduce the magnitude of macrostresses (a large value of which is characteristic of single-layer (TiMo)N coatings) and change the substructural characteristics in a wide range of values. It has been established that the use of multi-element (TiMo)N and (TiSi)N layers in a multilayer coating design allows one to achieve a high-hard state with high adhesive strength and good tribological characteristics