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Stoichiometry, phase composition, and properties of superhard nanostructured Ti–Hf–Si–N coatings obtained by deposition from high- frequency vacuum–arc discharge 62

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Stoichiometry, phase composition, and properties of superhard nanostructured Ti–Hf–Si–N coatings obtained by deposition from high- frequency vacuum–arc discharge 0 0 1 2 0 11 5

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