http://dspace.bsu.edu.ru/handle/123456789/28235| Title: | Silicon solar cells based on pSi/nSi3N4 nanolayers |
| Authors: | Zakhvalinskii, V. S. Piliuk, E. A. Goncharov, I. Yu. Simashkevich, A. V. Sherban, D. A. |
| Keywords: | physics solid state physics thin films Si3N4 thin films silicon solar cells nanolayers photovoltaic cells heterostructures magnetron sputtering |
| Issue Date: | 2016 |
| Citation: | Silicon solar cells based on pSi/nSi3N4 nanolayers / V.S. Zakhvalinskii [и др.] // Results in Physics. - 2016. - Vol.6.-P. 39-40. |
| Abstract: | Thin films of Si3N4 were prepared by non-reactive magnetron sputtering in an Ar atmosphere. A previously synthesized Si3N4 was used as a solid-state target. Deposition was carried out on a cold substrate of p-Si (100) with a resistivity of 2 Ohm cm. The Raman spectrum of the deposited Si3N4 layers has been investigated |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/28235 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Zakhvalinskii_Silicon.pdf | 366.15 kB | Adobe PDF | View/Open |
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