http://dspace.bsu.edu.ru/handle/123456789/28230| Title: | Temperature influence on the properties of thin Si₃N₄ films |
| Authors: | Zakhvalinskii, V. S. Abakumov, P. V. Piljuk, E. A. Rodriguez, G. V. Goncharov, I. Yu. Taran, S. V. |
| Keywords: | physics solid state physics thin films nanoscale films properties temperature influence Raman spectroscopy atomic force microscopy small-angle X-ray scattering |
| Issue Date: | 2015 |
| Citation: | Temperature influence on the properties of thin Si₃N₄ films / V.S. Zakhvalinskii [и др.] // Journal of Nano- and Electronic Physics. - 2015. - Vol.7, №4.-Art. 04052. |
| Abstract: | Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si₃N₄ (obtained by RF magnetron sputtering) |
| URI: | http://dspace.bsu.edu.ru/handle/123456789/28230 |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Zakhvalinskii_Temperature.pdf | 242.92 kB | Adobe PDF | View/Open |
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