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| Cr/Sc multilayer radiator for parametric EUV radiation in "water-window" spectral range | 154 |
| March 2026 | April 2026 | May 2026 | June 2026 | July 2026 | August 2026 | September 2026 | |
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| Cr/Sc multilayer radiator for parametric EUV radiation in "water-window" spectral range | 14 | 7 | 5 | 0 | 6 | 16 | 22 |
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| Uglov_Cr_Sc_Multilayer_Radiator.pdf | 105 |
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| United States | 48 |
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